Ceramics-Silikáty 47, (1) 28 - 31 (2003)

TiO₂ thin films have been deposited onto glass substrates by sol-gel process using dip coating method. The coating solution was prepared by using tetra-n-butylorthotitanate precursor. The thermal transformation behaviour of the fresh xerogel was followed by thermal analysis and powder X-ray diffraction .The gels annealed at temperatures up to 350°C were examined by XRD and found to be amorphous. The diffraction peaks of anatase were found in gels annealed at 350°C or higher temperatures. The successive dense and homogenous films were optically characterized using UV-spectrophotometry. It was observed that the films were transparent in visible region and showed characteristic absorption in UV region.