Ceramics-Silikáty 60, (4) 285 - 290 (2016) |
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PHYSICAL VAPOR DEPOSITION OF Er3+:Yb3Al5O12 THIN FILMS FROM SOL-GEL DERIVED TARGETS
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Hlásek T. 1, Rubešová K. 1, Jakeš V. 1, Nováček M. 1, Oswald J. 2, Fitl P. 3, Siegel J. 4, Macháč P. 4
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1 Department of Inorganic Chemistry, University of Chemistry and Technology Prague, Technická 5, Prague 6, 166 28, Czech Republic
2 Institute of Physics v.v.i., Academy of Sciences of the Czech Republic, Cukrovarnická 10, Prague 6, 162 00, Czech Republic
3 Department of Physics and Measurements, University of Chemistry and Technology Prague, Technická 5, Prague 6, 166 28, Czech Republic
4 Department of Solid State Engineering, University of Chemistry and Technology Prague, Technická 5, Prague 6, 166 28, Czech Republic
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Keywords: PLD, Electron beam deposition, Thin film, Ytterbium-aluminium garnet, Erbium
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Although ytterbium aluminum garnets (YbAG) belong to a group of promising optical materials, no physical method of thin films deposition has been described so far. In this work we present the comparison of two valuable physical deposition techniques: pulsed laser deposition and electron beam evaporation. Erbium (Er3+) doped ytterbium garnet (Er0.005Yb0.995)₃Al₅O12 (Er:YbAG) thin films were prepared using own sol-gel derived ceramic targets. The phase composition of the films and crystallite size were determined using X-ray diffraction. Microstructure and surface morphology were studied by scanning electron microscopy and atomic force microscopy. Deposition parameters of used methods were optimized; however, both techniques produced amorphous films with insufficient microstructure. The effect of additional annealing on the crystallinity and luminescent properties of erbium ions was studied. A pure infrared emission of Er3+ ions was observed only in samples prepared by pulsed laser deposition with subsequent annealing. |
Record in: Scopus | Web of Science |
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doi: 10.13168/cs.2016.0043
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