Ceramics-Silikáty 49, (1) 7 - 12 (2005) |
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CRYSTALLIZATION BEHAVIOR AND PHASE RELATIONS OF H-MOD DERIVED THIN FILMS BASED ON BARIUM SODIUM NIOBATES
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Lou Junhui 1, Lee Hee Young 1, Lee Joon-Hyung 2,
Kim Jeong-Joo 2,
Cho Sang-Hee 2
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1 Department of Materials Science and Engineering, Yeungnam University, Gyeongsan 712-749, Korea
2 Department of Inorganic Materials Engineering, Kyungpook National University, Daegu 702-701, Korea
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Keywords: Tungsten bronze structure, BNN, Ferroelectric thin film, H-MOD
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Ba₂NaNb₅O₁₅, hereafter called BNN, thin film is an attractive candidate for such applications as nonvolatile memory and electro-optic
devices. BNN thin films of about 450nm thickness that have different contents of Ba, Na and Nb have been prepared
by hybrid metalorganic decomposition, hereafter called H-MOD, process using bare and platinized Si wafers as substrate.
XRD and FE-SEM measurements were used to investigate the phase evolution behavior and the microstructure of the films.
It was found that Nb content strongly influenced the phase formation of the films, where BaNb₂O₆ phase was always formed
at the stoichiometric BNN composition. However, the amount of BaNb2O6 phase decreased with the increase of excess Nb content,
and the thin film with single phase orthorhombic tungsten bronze structure was obtained at the temperature as low as
750°C. |
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