Ceramics-Silikáty 55, (1) 36 - 42 (2011) |
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EFFECT OF SOL CONCENTRATION AND SUBSTRATE TYPE ON MICROSTRUCTURE FORMATION OF PZT THIN FILMS |
Bruncková Helena, Medvecký Ľubomír |
Institute of Materials Research, Slovak Academy of Sciences,
Watsonova 47, 040 01 Košice, Slovak Republic
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Keywords: Sol-gel, PZT thin films, Spin-coating, Perovskite phase |
Pb(Zr0.52Ti0.48)O₃ (PZT) sols were prepared by a modified sol-gel route using both solvents - acetic acid and stabilizer solution
(n-propanol : 1,2-propanediol in the rate 10 : 1). The sols were deposited by spin-coating onto platinized Al₂O₃ or SiO₂/Si
substrates. Results of SEM and XRD analyses confirmed, that the transformation of the amorphous PZT film to perovskite
structure happened after sintering at 650°C. The mechanism of microstructure formation has described for morphologicaly
different perovskite particle types in 1, 2 and 3-layered PZT thin films with thickness of 200-500 nm on used substrates. Three
different PZT film microstructure types in dependence on the applied sol concentration were found. It was found, that the
PZT/Pt/Al₂O₃ film microstructure at 1.0 M sol concentration was composed of two forms of perovskite particles, big rosette
and irregular cuboidal particles. Small spherical particles and rosette structure were found in PZT/Pt/Si/SiO₂ films. |
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