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Ceramics-Silikáty 63, (2) 213 - 222 (2019) |
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MICROSTRUCTURE AND MECHANICAL PROPERTIES OF ANNEALED WC/C COATINGS DEPOSITED WITH DIFFERENT GAS MIXTURES IN AN RFMS PROCESS
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Horňák Peter 1,2, Kottfer Daniel 3, Kaczmarek Lukasz 4, Kyziol Karol 5, Vavro Ján 1, Klich Marek 4, Trebuňa Jozef 3, Vrabeľ Marek 3, Franková Mária 3
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1 Alexander Dubček University of Trenčín, Faculty of Industrial Technologies, I. Krasku 491/30, 020 01 Púchov, Slovakia
2 Slovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, Slovakia
3 Technical University of Košice, Faculty of Mechanical Engineering, Mäsiarska 74, 040 01 Košice, Slovakia
4 Lodz University of Technology, Institute of Materials Science and Engineering, 1/15 Stefanowskiego Str., 90-924 Lodz, Poland
5 AGH University of Science and Technology, Faculty of Materials Science and Ceramics, A. Mickiewicza 30 Av., 30-059, Kraków, Poland
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Keywords: WC/C coating, RF magnetron sputtering, Annealing, Mechanical properties, Coefficient of friction.
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The optimised indented hardness (HIT) of WC/C coatings deposited using an RF magnetron sputtering technique in relation to the vacuum chamber pressure and bias is presented in this paper. Based on the investigation, the maximal values of hardness (ca. 22.3 GPa) and Young's modulus (ca. 298 GPa) are shown. Besides the hardness and Young's modulus values, the minimal value of the coefficient of friction (COF) ca. 0.29 was obtained. WC/C coatings were deposited with and without N₂ and N₂+SiH₄ (in a gas mixture) and they were subsequently annealed at 200 °C, 500 °C and 800 °C. Finally, they were evaluated from the aspect of HIT, EIT, COF and morphology as well as from the structural composition of the WC/C coatings before and after annealing. |
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doi: 10.13168/cs.2019.0013
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