Ceramics-Silikáty 59 (3) 187-193 (2015)

THE RAMAN SPECTROSCOPY USE FOR MONITORING OF CHANGES IN THE GLASS STRUCTURE OF THE THIN LAYERS CAUSED BY ION IMPLANTATION

In this paper, we have demonstrated the utility of Raman spectroscopy as a technique for the characterisation of changes in the glass structure of the thin layers caused by ion implantation. Various types of silicate glasses were implanted by Au⁺ ions with energy of 1.7 MeV and a fluence of 1 × 10¹⁶ ions·cm^-2 to create gold nanoparticles in thin sub-surface layer of the glass. It was proved that the structure of the glass has an indisputable impact on the extent of depolymerisation of the glass network after implantation. It was shown that the degree of glass matrix depolymerisation can be described using the evaluation of Q_n factors in the implanted layers from different depths. After analysis of Raman spectra, the relation between nucleation and the resulting parameters of the gold nanoparticles was put into connection with the feasibility of the glass to recover its structure during post-implantation annealing. Also the creation of new bonds in the glass network was discussed.

Keywords: Glasses; Nano particles; Raman spectroscopy; Ion implantation